11/27/2011	7:15:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	7:15:58 AM	Recipe started at 7:15 AM
11/27/2011	7:15:58 AM	Helium valve closed
11/27/2011	7:15:58 AM	H2 valve closed
11/27/2011	7:15:58 AM	BCl3 valve closed
11/27/2011	7:15:58 AM	PH3 valve closed
11/27/2011	7:15:58 AM	SiCl4 pre valve closed
11/27/2011	7:15:58 AM	SiCl4 post valve closed
11/27/2011	7:15:58 AM	Main Vac valve closed
11/27/2011	7:15:58 AM	Bypass valve closed
11/27/2011	7:15:58 AM	Bubbler valve closed
11/27/2011	7:15:58 AM	Helium MFC set to  0.000000
11/27/2011	7:15:58 AM	H2 MFC set to  0.000000
11/27/2011	7:15:58 AM	BCl3 MFC set to  0.000000
11/27/2011	7:15:58 AM	PHl3 MFC set to  0.000000
11/27/2011	7:15:58 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:15:58 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:15:58 AM	Tube furnace set to 0
11/27/2011	7:16:01 AM	H2 valve closed
11/27/2011	7:16:01 AM	BCl3 valve closed
11/27/2011	7:16:01 AM	PH3 valve closed
11/27/2011	7:16:01 AM	SiCl4 pre valve closed
11/27/2011	7:16:01 AM	SiCl4 post valve closed
11/27/2011	7:16:01 AM	Main Vac valve closed
11/27/2011	7:16:01 AM	Bypass valve closed
11/27/2011	7:16:01 AM	Bubbler valve closed
11/27/2011	7:16:01 AM	Helium valve opened
11/27/2011	7:16:01 AM	Helium MFC set to  500.000000
11/27/2011	7:16:01 AM	H2 MFC set to  0.000000
11/27/2011	7:16:01 AM	BCl3 MFC set to  0.000000
11/27/2011	7:16:01 AM	PHl3 MFC set to  0.000000
11/27/2011	7:16:01 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:16:01 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:16:01 AM	Tube furnace set to 0
11/27/2011	7:17:07 AM	Helium valve closed
11/27/2011	7:17:07 AM	H2 valve closed
11/27/2011	7:17:07 AM	BCl3 valve closed
11/27/2011	7:17:07 AM	PH3 valve closed
11/27/2011	7:17:07 AM	SiCl4 pre valve closed
11/27/2011	7:17:07 AM	SiCl4 post valve closed
11/27/2011	7:17:07 AM	Main Vac valve closed
11/27/2011	7:17:07 AM	Bypass valve closed
11/27/2011	7:17:07 AM	Bubbler valve closed
11/27/2011	7:17:07 AM	Helium MFC set to  0.000000
11/27/2011	7:17:07 AM	H2 MFC set to  0.000000
11/27/2011	7:17:07 AM	BCl3 MFC set to  0.000000
11/27/2011	7:17:07 AM	PHl3 MFC set to  0.000000
11/27/2011	7:17:07 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:17:07 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:17:07 AM	Tube furnace set to 0
11/27/2011	7:17:08 AM	Run finished at 7:17 AM
11/27/2011	7:17:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	7:24:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	7:24:30 AM	Recipe started at 7:24 AM
11/27/2011	7:24:30 AM	Helium valve closed
11/27/2011	7:24:30 AM	H2 valve closed
11/27/2011	7:24:30 AM	BCl3 valve closed
11/27/2011	7:24:30 AM	PH3 valve closed
11/27/2011	7:24:30 AM	SiCl4 pre valve closed
11/27/2011	7:24:30 AM	SiCl4 post valve closed
11/27/2011	7:24:30 AM	Main Vac valve closed
11/27/2011	7:24:30 AM	Bubbler valve closed
11/27/2011	7:24:30 AM	Bypass valve opened
11/27/2011	7:24:30 AM	Helium MFC set to  0.000000
11/27/2011	7:24:30 AM	H2 MFC set to  0.000000
11/27/2011	7:24:30 AM	BCl3 MFC set to  0.000000
11/27/2011	7:24:30 AM	PHl3 MFC set to  0.000000
11/27/2011	7:24:30 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:24:30 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:24:30 AM	Tube furnace set to 0
11/27/2011	7:25:33 AM	Helium valve closed
11/27/2011	7:25:33 AM	H2 valve closed
11/27/2011	7:25:33 AM	BCl3 valve closed
11/27/2011	7:25:33 AM	PH3 valve closed
11/27/2011	7:25:33 AM	SiCl4 pre valve closed
11/27/2011	7:25:33 AM	SiCl4 post valve closed
11/27/2011	7:25:33 AM	Main Vac valve closed
11/27/2011	7:25:33 AM	Bubbler valve closed
11/27/2011	7:25:33 AM	Bypass valve opened
11/27/2011	7:25:33 AM	Helium MFC set to  0.000000
11/27/2011	7:25:33 AM	H2 MFC set to  0.000000
11/27/2011	7:25:33 AM	BCl3 MFC set to  0.000000
11/27/2011	7:25:33 AM	PHl3 MFC set to  0.000000
11/27/2011	7:25:33 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:25:33 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:25:33 AM	Tube furnace set to 0
11/27/2011	7:26:33 AM	Helium valve closed
11/27/2011	7:26:33 AM	H2 valve closed
11/27/2011	7:26:33 AM	BCl3 valve closed
11/27/2011	7:26:33 AM	PH3 valve closed
11/27/2011	7:26:33 AM	SiCl4 pre valve closed
11/27/2011	7:26:33 AM	SiCl4 post valve closed
11/27/2011	7:26:33 AM	Bypass valve closed
11/27/2011	7:26:33 AM	Bubbler valve closed
11/27/2011	7:26:33 AM	Main Vac valve opened
11/27/2011	7:26:33 AM	Helium MFC set to  0.000000
11/27/2011	7:26:33 AM	H2 MFC set to  0.000000
11/27/2011	7:26:33 AM	BCl3 MFC set to  0.000000
11/27/2011	7:26:33 AM	PHl3 MFC set to  0.000000
11/27/2011	7:26:33 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:26:33 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:26:33 AM	Tube furnace set to 0
11/27/2011	7:26:34 AM	Run finished at 7:26 AM
11/27/2011	7:26:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	7:53:37 AM	Recipe started at 7:53 AM
11/27/2011	7:53:37 AM	Helium valve closed
11/27/2011	7:53:37 AM	H2 valve closed
11/27/2011	7:53:37 AM	BCl3 valve closed
11/27/2011	7:53:37 AM	PH3 valve closed
11/27/2011	7:53:37 AM	SiCl4 pre valve closed
11/27/2011	7:53:37 AM	SiCl4 post valve closed
11/27/2011	7:53:37 AM	Bypass valve closed
11/27/2011	7:53:37 AM	Bubbler valve closed
11/27/2011	7:53:37 AM	Main Vac valve opened
11/27/2011	7:53:37 AM	Helium MFC set to  0.000000
11/27/2011	7:53:37 AM	H2 MFC set to  0.000000
11/27/2011	7:53:37 AM	BCl3 MFC set to  0.000000
11/27/2011	7:53:37 AM	PHl3 MFC set to  0.000000
11/27/2011	7:53:37 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:53:37 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:53:38 AM	Tube furnace set to 0
11/27/2011	7:54:08 AM	H2 valve closed
11/27/2011	7:54:08 AM	BCl3 valve closed
11/27/2011	7:54:08 AM	PH3 valve closed
11/27/2011	7:54:08 AM	SiCl4 pre valve closed
11/27/2011	7:54:08 AM	SiCl4 post valve closed
11/27/2011	7:54:08 AM	Bypass valve closed
11/27/2011	7:54:08 AM	Bubbler valve closed
11/27/2011	7:54:08 AM	Helium valve opened
11/27/2011	7:54:08 AM	Main Vac valve opened
11/27/2011	7:54:08 AM	Helium MFC set to  20.000000
11/27/2011	7:54:08 AM	H2 MFC set to  0.000000
11/27/2011	7:54:08 AM	BCl3 MFC set to  0.000000
11/27/2011	7:54:08 AM	PHl3 MFC set to  0.000000
11/27/2011	7:54:08 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:54:08 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:54:08 AM	Tube furnace set to 0
11/27/2011	7:54:38 AM	Helium valve closed
11/27/2011	7:54:38 AM	H2 valve closed
11/27/2011	7:54:38 AM	BCl3 valve closed
11/27/2011	7:54:38 AM	PH3 valve closed
11/27/2011	7:54:38 AM	SiCl4 pre valve closed
11/27/2011	7:54:38 AM	SiCl4 post valve closed
11/27/2011	7:54:38 AM	Bypass valve closed
11/27/2011	7:54:38 AM	Bubbler valve closed
11/27/2011	7:54:38 AM	Main Vac valve opened
11/27/2011	7:54:38 AM	Helium MFC set to  0.000000
11/27/2011	7:54:38 AM	H2 MFC set to  0.000000
11/27/2011	7:54:38 AM	BCl3 MFC set to  0.000000
11/27/2011	7:54:38 AM	PHl3 MFC set to  0.000000
11/27/2011	7:54:38 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:54:38 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:54:38 AM	Tube furnace set to 0
11/27/2011	7:55:08 AM	H2 valve closed
11/27/2011	7:55:08 AM	BCl3 valve closed
11/27/2011	7:55:08 AM	PH3 valve closed
11/27/2011	7:55:08 AM	SiCl4 pre valve closed
11/27/2011	7:55:08 AM	SiCl4 post valve closed
11/27/2011	7:55:08 AM	Bypass valve closed
11/27/2011	7:55:08 AM	Bubbler valve closed
11/27/2011	7:55:08 AM	Helium valve opened
11/27/2011	7:55:08 AM	Main Vac valve opened
11/27/2011	7:55:08 AM	Helium MFC set to  20.000000
11/27/2011	7:55:08 AM	H2 MFC set to  0.000000
11/27/2011	7:55:08 AM	BCl3 MFC set to  0.000000
11/27/2011	7:55:08 AM	PHl3 MFC set to  0.000000
11/27/2011	7:55:08 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:55:08 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:55:08 AM	Tube furnace set to 0
11/27/2011	7:55:38 AM	Helium valve closed
11/27/2011	7:55:38 AM	H2 valve closed
11/27/2011	7:55:38 AM	BCl3 valve closed
11/27/2011	7:55:38 AM	PH3 valve closed
11/27/2011	7:55:38 AM	SiCl4 pre valve closed
11/27/2011	7:55:38 AM	SiCl4 post valve closed
11/27/2011	7:55:38 AM	Bypass valve closed
11/27/2011	7:55:38 AM	Bubbler valve closed
11/27/2011	7:55:38 AM	Main Vac valve opened
11/27/2011	7:55:38 AM	Helium MFC set to  0.000000
11/27/2011	7:55:38 AM	H2 MFC set to  0.000000
11/27/2011	7:55:38 AM	BCl3 MFC set to  0.000000
11/27/2011	7:55:38 AM	PHl3 MFC set to  0.000000
11/27/2011	7:55:38 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:55:38 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:55:38 AM	Tube furnace set to 0
11/27/2011	7:56:08 AM	H2 valve closed
11/27/2011	7:56:08 AM	BCl3 valve closed
11/27/2011	7:56:08 AM	PH3 valve closed
11/27/2011	7:56:08 AM	SiCl4 pre valve closed
11/27/2011	7:56:08 AM	SiCl4 post valve closed
11/27/2011	7:56:08 AM	Bypass valve closed
11/27/2011	7:56:08 AM	Bubbler valve closed
11/27/2011	7:56:08 AM	Helium valve opened
11/27/2011	7:56:08 AM	Main Vac valve opened
11/27/2011	7:56:08 AM	Helium MFC set to  20.000000
11/27/2011	7:56:08 AM	H2 MFC set to  0.000000
11/27/2011	7:56:08 AM	BCl3 MFC set to  0.000000
11/27/2011	7:56:08 AM	PHl3 MFC set to  0.000000
11/27/2011	7:56:08 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:56:08 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:56:09 AM	Tube furnace set to 0
11/27/2011	7:56:39 AM	Helium valve closed
11/27/2011	7:56:39 AM	H2 valve closed
11/27/2011	7:56:39 AM	BCl3 valve closed
11/27/2011	7:56:39 AM	PH3 valve closed
11/27/2011	7:56:39 AM	SiCl4 pre valve closed
11/27/2011	7:56:39 AM	SiCl4 post valve closed
11/27/2011	7:56:39 AM	Bypass valve closed
11/27/2011	7:56:39 AM	Bubbler valve closed
11/27/2011	7:56:39 AM	Main Vac valve opened
11/27/2011	7:56:39 AM	Helium MFC set to  0.000000
11/27/2011	7:56:39 AM	H2 MFC set to  0.000000
11/27/2011	7:56:39 AM	BCl3 MFC set to  0.000000
11/27/2011	7:56:39 AM	PHl3 MFC set to  0.000000
11/27/2011	7:56:39 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:56:39 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:56:39 AM	Tube furnace set to 0
11/27/2011	7:57:09 AM	H2 valve closed
11/27/2011	7:57:09 AM	BCl3 valve closed
11/27/2011	7:57:09 AM	PH3 valve closed
11/27/2011	7:57:09 AM	SiCl4 pre valve closed
11/27/2011	7:57:09 AM	SiCl4 post valve closed
11/27/2011	7:57:09 AM	Bypass valve closed
11/27/2011	7:57:09 AM	Bubbler valve closed
11/27/2011	7:57:09 AM	Helium valve opened
11/27/2011	7:57:09 AM	Main Vac valve opened
11/27/2011	7:57:09 AM	Helium MFC set to  20.000000
11/27/2011	7:57:09 AM	H2 MFC set to  0.000000
11/27/2011	7:57:09 AM	BCl3 MFC set to  0.000000
11/27/2011	7:57:09 AM	PHl3 MFC set to  0.000000
11/27/2011	7:57:09 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:57:09 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:57:09 AM	Tube furnace set to 0
11/27/2011	7:57:39 AM	Helium valve closed
11/27/2011	7:57:39 AM	H2 valve closed
11/27/2011	7:57:39 AM	BCl3 valve closed
11/27/2011	7:57:39 AM	PH3 valve closed
11/27/2011	7:57:39 AM	SiCl4 pre valve closed
11/27/2011	7:57:39 AM	SiCl4 post valve closed
11/27/2011	7:57:39 AM	Bypass valve closed
11/27/2011	7:57:39 AM	Bubbler valve closed
11/27/2011	7:57:39 AM	Main Vac valve opened
11/27/2011	7:57:39 AM	Helium MFC set to  0.000000
11/27/2011	7:57:39 AM	H2 MFC set to  0.000000
11/27/2011	7:57:39 AM	BCl3 MFC set to  0.000000
11/27/2011	7:57:39 AM	PHl3 MFC set to  0.000000
11/27/2011	7:57:39 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:57:39 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:57:39 AM	Tube furnace set to 0
11/27/2011	7:58:09 AM	H2 valve closed
11/27/2011	7:58:09 AM	BCl3 valve closed
11/27/2011	7:58:09 AM	PH3 valve closed
11/27/2011	7:58:09 AM	SiCl4 pre valve closed
11/27/2011	7:58:09 AM	SiCl4 post valve closed
11/27/2011	7:58:09 AM	Bypass valve closed
11/27/2011	7:58:09 AM	Bubbler valve closed
11/27/2011	7:58:09 AM	Helium valve opened
11/27/2011	7:58:09 AM	Main Vac valve opened
11/27/2011	7:58:09 AM	Helium MFC set to  20.000000
11/27/2011	7:58:09 AM	H2 MFC set to  0.000000
11/27/2011	7:58:09 AM	BCl3 MFC set to  0.000000
11/27/2011	7:58:09 AM	PHl3 MFC set to  0.000000
11/27/2011	7:58:09 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:58:09 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:58:09 AM	Tube furnace set to 0
11/27/2011	7:58:39 AM	Helium valve closed
11/27/2011	7:58:39 AM	H2 valve closed
11/27/2011	7:58:39 AM	BCl3 valve closed
11/27/2011	7:58:39 AM	PH3 valve closed
11/27/2011	7:58:39 AM	SiCl4 pre valve closed
11/27/2011	7:58:39 AM	SiCl4 post valve closed
11/27/2011	7:58:39 AM	Bypass valve closed
11/27/2011	7:58:39 AM	Bubbler valve closed
11/27/2011	7:58:39 AM	Main Vac valve opened
11/27/2011	7:58:39 AM	Helium MFC set to  0.000000
11/27/2011	7:58:39 AM	H2 MFC set to  0.000000
11/27/2011	7:58:39 AM	BCl3 MFC set to  0.000000
11/27/2011	7:58:39 AM	PHl3 MFC set to  0.000000
11/27/2011	7:58:39 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:58:39 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:58:40 AM	Tube furnace set to 0
11/27/2011	7:59:10 AM	H2 valve closed
11/27/2011	7:59:10 AM	BCl3 valve closed
11/27/2011	7:59:10 AM	PH3 valve closed
11/27/2011	7:59:10 AM	SiCl4 pre valve closed
11/27/2011	7:59:10 AM	SiCl4 post valve closed
11/27/2011	7:59:10 AM	Bypass valve closed
11/27/2011	7:59:10 AM	Bubbler valve closed
11/27/2011	7:59:10 AM	Helium valve opened
11/27/2011	7:59:10 AM	Main Vac valve opened
11/27/2011	7:59:10 AM	Helium MFC set to  20.000000
11/27/2011	7:59:10 AM	H2 MFC set to  0.000000
11/27/2011	7:59:10 AM	BCl3 MFC set to  0.000000
11/27/2011	7:59:10 AM	PHl3 MFC set to  0.000000
11/27/2011	7:59:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:59:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:59:10 AM	Tube furnace set to 0
11/27/2011	7:59:40 AM	Helium valve closed
11/27/2011	7:59:40 AM	H2 valve closed
11/27/2011	7:59:40 AM	BCl3 valve closed
11/27/2011	7:59:40 AM	PH3 valve closed
11/27/2011	7:59:40 AM	SiCl4 pre valve closed
11/27/2011	7:59:40 AM	SiCl4 post valve closed
11/27/2011	7:59:40 AM	Bypass valve closed
11/27/2011	7:59:40 AM	Bubbler valve closed
11/27/2011	7:59:40 AM	Main Vac valve opened
11/27/2011	7:59:40 AM	Helium MFC set to  0.000000
11/27/2011	7:59:40 AM	H2 MFC set to  0.000000
11/27/2011	7:59:40 AM	BCl3 MFC set to  0.000000
11/27/2011	7:59:40 AM	PHl3 MFC set to  0.000000
11/27/2011	7:59:40 AM	SiCl4 MFC set to  0.000000
11/27/2011	7:59:40 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:59:40 AM	Tube furnace set to 0
11/27/2011	8:00:10 AM	H2 valve closed
11/27/2011	8:00:10 AM	BCl3 valve closed
11/27/2011	8:00:10 AM	PH3 valve closed
11/27/2011	8:00:10 AM	SiCl4 pre valve closed
11/27/2011	8:00:10 AM	SiCl4 post valve closed
11/27/2011	8:00:10 AM	Bypass valve closed
11/27/2011	8:00:10 AM	Bubbler valve closed
11/27/2011	8:00:10 AM	Helium valve opened
11/27/2011	8:00:10 AM	Main Vac valve opened
11/27/2011	8:00:10 AM	Helium MFC set to  20.000000
11/27/2011	8:00:10 AM	H2 MFC set to  0.000000
11/27/2011	8:00:10 AM	BCl3 MFC set to  0.000000
11/27/2011	8:00:10 AM	PHl3 MFC set to  0.000000
11/27/2011	8:00:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:00:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:00:10 AM	Tube furnace set to 0
11/27/2011	8:00:40 AM	Helium valve closed
11/27/2011	8:00:40 AM	H2 valve closed
11/27/2011	8:00:40 AM	BCl3 valve closed
11/27/2011	8:00:40 AM	PH3 valve closed
11/27/2011	8:00:40 AM	SiCl4 pre valve closed
11/27/2011	8:00:40 AM	SiCl4 post valve closed
11/27/2011	8:00:40 AM	Bypass valve closed
11/27/2011	8:00:40 AM	Bubbler valve closed
11/27/2011	8:00:40 AM	Main Vac valve opened
11/27/2011	8:00:40 AM	Helium MFC set to  0.000000
11/27/2011	8:00:40 AM	H2 MFC set to  0.000000
11/27/2011	8:00:40 AM	BCl3 MFC set to  0.000000
11/27/2011	8:00:40 AM	PHl3 MFC set to  0.000000
11/27/2011	8:00:40 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:00:40 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:00:40 AM	Tube furnace set to 0
11/27/2011	8:01:10 AM	H2 valve closed
11/27/2011	8:01:10 AM	BCl3 valve closed
11/27/2011	8:01:10 AM	PH3 valve closed
11/27/2011	8:01:10 AM	SiCl4 pre valve closed
11/27/2011	8:01:10 AM	SiCl4 post valve closed
11/27/2011	8:01:10 AM	Bypass valve closed
11/27/2011	8:01:10 AM	Bubbler valve closed
11/27/2011	8:01:10 AM	Helium valve opened
11/27/2011	8:01:10 AM	Main Vac valve opened
11/27/2011	8:01:10 AM	Helium MFC set to  20.000000
11/27/2011	8:01:10 AM	H2 MFC set to  0.000000
11/27/2011	8:01:10 AM	BCl3 MFC set to  0.000000
11/27/2011	8:01:10 AM	PHl3 MFC set to  0.000000
11/27/2011	8:01:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:01:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:01:11 AM	Tube furnace set to 0
11/27/2011	8:01:41 AM	Helium valve closed
11/27/2011	8:01:41 AM	H2 valve closed
11/27/2011	8:01:41 AM	BCl3 valve closed
11/27/2011	8:01:41 AM	PH3 valve closed
11/27/2011	8:01:41 AM	SiCl4 pre valve closed
11/27/2011	8:01:41 AM	SiCl4 post valve closed
11/27/2011	8:01:41 AM	Bypass valve closed
11/27/2011	8:01:41 AM	Bubbler valve closed
11/27/2011	8:01:41 AM	Main Vac valve opened
11/27/2011	8:01:41 AM	Helium MFC set to  0.000000
11/27/2011	8:01:41 AM	H2 MFC set to  0.000000
11/27/2011	8:01:41 AM	BCl3 MFC set to  0.000000
11/27/2011	8:01:41 AM	PHl3 MFC set to  0.000000
11/27/2011	8:01:41 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:01:41 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:01:41 AM	Tube furnace set to 0
11/27/2011	8:02:11 AM	H2 valve closed
11/27/2011	8:02:11 AM	BCl3 valve closed
11/27/2011	8:02:11 AM	PH3 valve closed
11/27/2011	8:02:11 AM	SiCl4 pre valve closed
11/27/2011	8:02:11 AM	SiCl4 post valve closed
11/27/2011	8:02:11 AM	Bypass valve closed
11/27/2011	8:02:11 AM	Bubbler valve closed
11/27/2011	8:02:11 AM	Helium valve opened
11/27/2011	8:02:11 AM	Main Vac valve opened
11/27/2011	8:02:11 AM	Helium MFC set to  20.000000
11/27/2011	8:02:11 AM	H2 MFC set to  0.000000
11/27/2011	8:02:11 AM	BCl3 MFC set to  0.000000
11/27/2011	8:02:11 AM	PHl3 MFC set to  0.000000
11/27/2011	8:02:11 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:02:11 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:02:11 AM	Tube furnace set to 0
11/27/2011	8:02:41 AM	Helium valve closed
11/27/2011	8:02:41 AM	H2 valve closed
11/27/2011	8:02:41 AM	BCl3 valve closed
11/27/2011	8:02:41 AM	PH3 valve closed
11/27/2011	8:02:41 AM	SiCl4 pre valve closed
11/27/2011	8:02:41 AM	SiCl4 post valve closed
11/27/2011	8:02:41 AM	Bypass valve closed
11/27/2011	8:02:41 AM	Bubbler valve closed
11/27/2011	8:02:41 AM	Main Vac valve opened
11/27/2011	8:02:41 AM	Helium MFC set to  0.000000
11/27/2011	8:02:41 AM	H2 MFC set to  0.000000
11/27/2011	8:02:41 AM	BCl3 MFC set to  0.000000
11/27/2011	8:02:41 AM	PHl3 MFC set to  0.000000
11/27/2011	8:02:41 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:02:41 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:02:41 AM	Tube furnace set to 0
11/27/2011	8:02:43 AM	Run aborted at 8:02 AM
11/27/2011	8:02:43 AM	Helium valve closed
11/27/2011	8:02:43 AM	H2 valve closed
11/27/2011	8:02:43 AM	BCl3 valve closed
11/27/2011	8:02:43 AM	PH3 valve closed
11/27/2011	8:02:43 AM	SiCl4 pre valve closed
11/27/2011	8:02:43 AM	SiCl4 post valve closed
11/27/2011	8:02:43 AM	Bypass valve closed
11/27/2011	8:02:43 AM	Main Vac valve closed
11/27/2011	8:02:43 AM	Bubbler valve closed
11/27/2011	8:02:43 AM	Helium MFC set to  0.000000
11/27/2011	8:02:43 AM	H2 MFC set to  0.000000
11/27/2011	8:02:43 AM	BCl3 MFC set to  0.000000
11/27/2011	8:02:43 AM	PHl3 MFC set to  0.000000
11/27/2011	8:02:43 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:02:43 AM	Tube furnace set to 0
11/27/2011	8:02:48 AM	Main Vac valve opened
11/27/2011	8:07:29 AM	Main Vac valve closed
11/27/2011	8:07:42 AM	Main Vac valve opened
11/27/2011	8:08:04 AM	Recipe started at 8:08 AM
11/27/2011	8:08:04 AM	Helium valve closed
11/27/2011	8:08:04 AM	H2 valve closed
11/27/2011	8:08:04 AM	BCl3 valve closed
11/27/2011	8:08:04 AM	PH3 valve closed
11/27/2011	8:08:04 AM	SiCl4 pre valve closed
11/27/2011	8:08:04 AM	SiCl4 post valve closed
11/27/2011	8:08:04 AM	Main Vac valve closed
11/27/2011	8:08:04 AM	Bypass valve closed
11/27/2011	8:08:04 AM	Bubbler valve closed
11/27/2011	8:08:04 AM	Helium MFC set to  0.000000
11/27/2011	8:08:04 AM	H2 MFC set to  0.000000
11/27/2011	8:08:04 AM	BCl3 MFC set to  0.000000
11/27/2011	8:08:04 AM	PHl3 MFC set to  0.000000
11/27/2011	8:08:04 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:08:04 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:08:05 AM	Tube furnace set to 0
11/27/2011	8:08:05 AM	Run aborted at 8:08 AM
11/27/2011	8:08:05 AM	Helium valve closed
11/27/2011	8:08:05 AM	H2 valve closed
11/27/2011	8:08:05 AM	BCl3 valve closed
11/27/2011	8:08:05 AM	PH3 valve closed
11/27/2011	8:08:05 AM	SiCl4 pre valve closed
11/27/2011	8:08:05 AM	SiCl4 post valve closed
11/27/2011	8:08:05 AM	Bypass valve closed
11/27/2011	8:08:05 AM	Main Vac valve closed
11/27/2011	8:08:05 AM	Bubbler valve closed
11/27/2011	8:08:05 AM	Helium MFC set to  0.000000
11/27/2011	8:08:05 AM	H2 MFC set to  0.000000
11/27/2011	8:08:05 AM	BCl3 MFC set to  0.000000
11/27/2011	8:08:05 AM	PHl3 MFC set to  0.000000
11/27/2011	8:08:05 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:08:05 AM	Tube furnace set to 0
11/27/2011	8:08:57 AM	Recipe started at 8:08 AM
11/27/2011	8:08:57 AM	Helium valve closed
11/27/2011	8:08:57 AM	H2 valve closed
11/27/2011	8:08:57 AM	BCl3 valve closed
11/27/2011	8:08:57 AM	PH3 valve closed
11/27/2011	8:08:57 AM	SiCl4 pre valve closed
11/27/2011	8:08:57 AM	SiCl4 post valve closed
11/27/2011	8:08:57 AM	Main Vac valve closed
11/27/2011	8:08:57 AM	Bypass valve closed
11/27/2011	8:08:57 AM	Bubbler valve closed
11/27/2011	8:08:57 AM	Helium MFC set to  0.000000
11/27/2011	8:08:57 AM	H2 MFC set to  0.000000
11/27/2011	8:08:57 AM	BCl3 MFC set to  0.000000
11/27/2011	8:08:57 AM	PHl3 MFC set to  0.000000
11/27/2011	8:08:57 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:08:57 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:08:57 AM	Tube furnace set to 0
11/27/2011	8:09:00 AM	Helium valve closed
11/27/2011	8:09:00 AM	BCl3 valve closed
11/27/2011	8:09:00 AM	PH3 valve closed
11/27/2011	8:09:00 AM	SiCl4 pre valve closed
11/27/2011	8:09:00 AM	SiCl4 post valve closed
11/27/2011	8:09:00 AM	Main Vac valve closed
11/27/2011	8:09:00 AM	Bypass valve closed
11/27/2011	8:09:00 AM	Bubbler valve closed
11/27/2011	8:09:00 AM	H2 valve opened
11/27/2011	8:09:00 AM	Helium MFC set to  0.000000
11/27/2011	8:09:00 AM	H2 MFC set to  500.000000
11/27/2011	8:09:00 AM	BCl3 MFC set to  0.000000
11/27/2011	8:09:00 AM	PHl3 MFC set to  0.000000
11/27/2011	8:09:00 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:09:00 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:09:00 AM	Tube furnace set to 0
11/27/2011	8:10:08 AM	Helium valve closed
11/27/2011	8:10:08 AM	BCl3 valve closed
11/27/2011	8:10:08 AM	PH3 valve closed
11/27/2011	8:10:08 AM	SiCl4 pre valve closed
11/27/2011	8:10:08 AM	SiCl4 post valve closed
11/27/2011	8:10:08 AM	Main Vac valve closed
11/27/2011	8:10:08 AM	Bypass valve closed
11/27/2011	8:10:08 AM	H2 valve opened
11/27/2011	8:10:08 AM	Bubbler valve opened
11/27/2011	8:10:08 AM	Helium MFC set to  0.000000
11/27/2011	8:10:08 AM	H2 MFC set to  500.000000
11/27/2011	8:10:08 AM	BCl3 MFC set to  0.000000
11/27/2011	8:10:08 AM	PHl3 MFC set to  0.000000
11/27/2011	8:10:08 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:10:08 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:10:09 AM	Tube furnace set to 0
11/27/2011	8:10:10 AM	Helium valve closed
11/27/2011	8:10:10 AM	BCl3 valve closed
11/27/2011	8:10:10 AM	PH3 valve closed
11/27/2011	8:10:10 AM	SiCl4 pre valve closed
11/27/2011	8:10:10 AM	SiCl4 post valve closed
11/27/2011	8:10:10 AM	Main Vac valve closed
11/27/2011	8:10:10 AM	Bypass valve closed
11/27/2011	8:10:10 AM	H2 valve opened
11/27/2011	8:10:10 AM	Bubbler valve opened
11/27/2011	8:10:10 AM	Helium MFC set to  0.000000
11/27/2011	8:10:10 AM	H2 MFC set to  500.000000
11/27/2011	8:10:10 AM	BCl3 MFC set to  0.000000
11/27/2011	8:10:10 AM	PHl3 MFC set to  0.000000
11/27/2011	8:10:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:10:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:10:10 AM	Tube furnace set to 1000
11/27/2011	8:30:10 AM	Helium valve closed
11/27/2011	8:30:10 AM	BCl3 valve closed
11/27/2011	8:30:10 AM	PH3 valve closed
11/27/2011	8:30:10 AM	SiCl4 pre valve closed
11/27/2011	8:30:10 AM	SiCl4 post valve closed
11/27/2011	8:30:10 AM	Main Vac valve closed
11/27/2011	8:30:10 AM	Bypass valve closed
11/27/2011	8:30:10 AM	H2 valve opened
11/27/2011	8:30:10 AM	Bubbler valve opened
11/27/2011	8:30:10 AM	Helium MFC set to  0.000000
11/27/2011	8:30:10 AM	H2 MFC set to  500.000000
11/27/2011	8:30:10 AM	BCl3 MFC set to  0.000000
11/27/2011	8:30:10 AM	PHl3 MFC set to  0.000000
11/27/2011	8:30:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:30:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:30:10 AM	Tube furnace set to 1000
11/27/2011	8:45:10 AM	Helium valve closed
11/27/2011	8:45:10 AM	BCl3 valve closed
11/27/2011	8:45:10 AM	PH3 valve closed
11/27/2011	8:45:10 AM	SiCl4 pre valve closed
11/27/2011	8:45:10 AM	SiCl4 post valve closed
11/27/2011	8:45:10 AM	Main Vac valve closed
11/27/2011	8:45:10 AM	Bypass valve closed
11/27/2011	8:45:10 AM	H2 valve opened
11/27/2011	8:45:10 AM	Bubbler valve opened
11/27/2011	8:45:10 AM	Helium MFC set to  0.000000
11/27/2011	8:45:10 AM	H2 MFC set to  500.000000
11/27/2011	8:45:10 AM	BCl3 MFC set to  0.000000
11/27/2011	8:45:10 AM	PHl3 MFC set to  0.000000
11/27/2011	8:45:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	8:45:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:45:10 AM	Tube furnace set to 750
11/27/2011	9:00:10 AM	H2 valve closed
11/27/2011	9:00:10 AM	BCl3 valve closed
11/27/2011	9:00:10 AM	PH3 valve closed
11/27/2011	9:00:10 AM	SiCl4 pre valve closed
11/27/2011	9:00:10 AM	SiCl4 post valve closed
11/27/2011	9:00:10 AM	Main Vac valve closed
11/27/2011	9:00:10 AM	Bypass valve closed
11/27/2011	9:00:10 AM	Helium valve opened
11/27/2011	9:00:10 AM	Bubbler valve opened
11/27/2011	9:00:10 AM	Helium MFC set to  500.000000
11/27/2011	9:00:10 AM	H2 MFC set to  0.000000
11/27/2011	9:00:10 AM	BCl3 MFC set to  0.000000
11/27/2011	9:00:10 AM	PHl3 MFC set to  0.000000
11/27/2011	9:00:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:00:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:00:10 AM	Tube furnace set to 0
11/27/2011	9:20:10 AM	Helium valve closed
11/27/2011	9:20:10 AM	H2 valve closed
11/27/2011	9:20:10 AM	BCl3 valve closed
11/27/2011	9:20:10 AM	PH3 valve closed
11/27/2011	9:20:10 AM	SiCl4 pre valve closed
11/27/2011	9:20:10 AM	SiCl4 post valve closed
11/27/2011	9:20:10 AM	Main Vac valve closed
11/27/2011	9:20:10 AM	Bypass valve closed
11/27/2011	9:20:10 AM	Bubbler valve closed
11/27/2011	9:20:10 AM	Helium MFC set to  0.000000
11/27/2011	9:20:10 AM	H2 MFC set to  0.000000
11/27/2011	9:20:10 AM	BCl3 MFC set to  0.000000
11/27/2011	9:20:10 AM	PHl3 MFC set to  0.000000
11/27/2011	9:20:10 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:20:10 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:20:10 AM	Tube furnace set to 0
11/27/2011	9:39:42 AM	Run aborted at 9:39 AM
11/27/2011	9:39:42 AM	Helium valve closed
11/27/2011	9:39:42 AM	H2 valve closed
11/27/2011	9:39:42 AM	BCl3 valve closed
11/27/2011	9:39:42 AM	PH3 valve closed
11/27/2011	9:39:42 AM	SiCl4 pre valve closed
11/27/2011	9:39:42 AM	SiCl4 post valve closed
11/27/2011	9:39:42 AM	Bypass valve closed
11/27/2011	9:39:42 AM	Main Vac valve closed
11/27/2011	9:39:42 AM	Bubbler valve closed
11/27/2011	9:39:42 AM	Helium MFC set to  0.000000
11/27/2011	9:39:42 AM	H2 MFC set to  0.000000
11/27/2011	9:39:42 AM	BCl3 MFC set to  0.000000
11/27/2011	9:39:42 AM	PHl3 MFC set to  0.000000
11/27/2011	9:39:42 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:39:42 AM	Tube furnace set to 0
11/27/2011	9:39:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	9:39:51 AM	Recipe started at 9:39 AM
11/27/2011	9:39:51 AM	Helium valve closed
11/27/2011	9:39:51 AM	H2 valve closed
11/27/2011	9:39:51 AM	BCl3 valve closed
11/27/2011	9:39:51 AM	PH3 valve closed
11/27/2011	9:39:51 AM	SiCl4 pre valve closed
11/27/2011	9:39:51 AM	SiCl4 post valve closed
11/27/2011	9:39:51 AM	Main Vac valve closed
11/27/2011	9:39:51 AM	Bypass valve closed
11/27/2011	9:39:51 AM	Bubbler valve closed
11/27/2011	9:39:51 AM	Helium MFC set to  0.000000
11/27/2011	9:39:51 AM	H2 MFC set to  0.000000
11/27/2011	9:39:51 AM	BCl3 MFC set to  0.000000
11/27/2011	9:39:51 AM	PHl3 MFC set to  0.000000
11/27/2011	9:39:51 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:39:51 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:39:51 AM	Tube furnace set to 0
11/27/2011	9:39:54 AM	H2 valve closed
11/27/2011	9:39:54 AM	BCl3 valve closed
11/27/2011	9:39:54 AM	PH3 valve closed
11/27/2011	9:39:54 AM	SiCl4 pre valve closed
11/27/2011	9:39:54 AM	SiCl4 post valve closed
11/27/2011	9:39:54 AM	Main Vac valve closed
11/27/2011	9:39:54 AM	Bypass valve closed
11/27/2011	9:39:54 AM	Bubbler valve closed
11/27/2011	9:39:54 AM	Helium valve opened
11/27/2011	9:39:54 AM	Helium MFC set to  500.000000
11/27/2011	9:39:54 AM	H2 MFC set to  0.000000
11/27/2011	9:39:54 AM	BCl3 MFC set to  0.000000
11/27/2011	9:39:54 AM	PHl3 MFC set to  0.000000
11/27/2011	9:39:54 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:39:54 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:39:54 AM	Tube furnace set to 0
11/27/2011	9:39:58 AM	Helium valve closed
11/27/2011	9:39:58 AM	H2 valve closed
11/27/2011	9:39:58 AM	BCl3 valve closed
11/27/2011	9:39:58 AM	PH3 valve closed
11/27/2011	9:39:58 AM	SiCl4 pre valve closed
11/27/2011	9:39:58 AM	SiCl4 post valve closed
11/27/2011	9:39:58 AM	Main Vac valve closed
11/27/2011	9:39:58 AM	Bypass valve closed
11/27/2011	9:39:58 AM	Bubbler valve closed
11/27/2011	9:39:58 AM	Helium MFC set to  0.000000
11/27/2011	9:39:58 AM	H2 MFC set to  0.000000
11/27/2011	9:39:58 AM	BCl3 MFC set to  0.000000
11/27/2011	9:39:58 AM	PHl3 MFC set to  0.000000
11/27/2011	9:39:58 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:39:58 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:39:58 AM	Tube furnace set to 0
11/27/2011	9:39:59 AM	Run finished at 9:39 AM
11/27/2011	9:39:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	9:47:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	9:47:43 AM	Recipe started at 9:47 AM
11/27/2011	9:47:43 AM	Helium valve closed
11/27/2011	9:47:43 AM	H2 valve closed
11/27/2011	9:47:43 AM	BCl3 valve closed
11/27/2011	9:47:43 AM	PH3 valve closed
11/27/2011	9:47:43 AM	SiCl4 pre valve closed
11/27/2011	9:47:43 AM	SiCl4 post valve closed
11/27/2011	9:47:43 AM	Main Vac valve closed
11/27/2011	9:47:43 AM	Bubbler valve closed
11/27/2011	9:47:43 AM	Bypass valve opened
11/27/2011	9:47:43 AM	Helium MFC set to  0.000000
11/27/2011	9:47:43 AM	H2 MFC set to  0.000000
11/27/2011	9:47:43 AM	BCl3 MFC set to  0.000000
11/27/2011	9:47:43 AM	PHl3 MFC set to  0.000000
11/27/2011	9:47:43 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:47:43 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:47:43 AM	Tube furnace set to 0
11/27/2011	9:48:47 AM	Helium valve closed
11/27/2011	9:48:47 AM	H2 valve closed
11/27/2011	9:48:47 AM	BCl3 valve closed
11/27/2011	9:48:47 AM	PH3 valve closed
11/27/2011	9:48:47 AM	SiCl4 pre valve closed
11/27/2011	9:48:47 AM	SiCl4 post valve closed
11/27/2011	9:48:47 AM	Main Vac valve closed
11/27/2011	9:48:47 AM	Bubbler valve closed
11/27/2011	9:48:47 AM	Bypass valve opened
11/27/2011	9:48:47 AM	Helium MFC set to  0.000000
11/27/2011	9:48:47 AM	H2 MFC set to  0.000000
11/27/2011	9:48:47 AM	BCl3 MFC set to  0.000000
11/27/2011	9:48:47 AM	PHl3 MFC set to  0.000000
11/27/2011	9:48:47 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:48:47 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:48:47 AM	Tube furnace set to 0
11/27/2011	9:49:47 AM	Helium valve closed
11/27/2011	9:49:47 AM	H2 valve closed
11/27/2011	9:49:47 AM	BCl3 valve closed
11/27/2011	9:49:47 AM	PH3 valve closed
11/27/2011	9:49:47 AM	SiCl4 pre valve closed
11/27/2011	9:49:47 AM	SiCl4 post valve closed
11/27/2011	9:49:47 AM	Bypass valve closed
11/27/2011	9:49:47 AM	Bubbler valve closed
11/27/2011	9:49:47 AM	Main Vac valve opened
11/27/2011	9:49:47 AM	Helium MFC set to  0.000000
11/27/2011	9:49:47 AM	H2 MFC set to  0.000000
11/27/2011	9:49:47 AM	BCl3 MFC set to  0.000000
11/27/2011	9:49:47 AM	PHl3 MFC set to  0.000000
11/27/2011	9:49:47 AM	SiCl4 MFC set to  0.000000
11/27/2011	9:49:47 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	9:49:47 AM	Tube furnace set to 0
11/27/2011	9:49:48 AM	Run finished at 9:49 AM
11/27/2011	9:49:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	10:14:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	10:14:53 AM	Recipe started at 10:14 AM
11/27/2011	10:14:53 AM	Helium valve closed
11/27/2011	10:14:53 AM	H2 valve closed
11/27/2011	10:14:53 AM	BCl3 valve closed
11/27/2011	10:14:53 AM	PH3 valve closed
11/27/2011	10:14:53 AM	SiCl4 pre valve closed
11/27/2011	10:14:53 AM	SiCl4 post valve closed
11/27/2011	10:14:53 AM	Main Vac valve closed
11/27/2011	10:14:53 AM	Bypass valve closed
11/27/2011	10:14:53 AM	Bubbler valve closed
11/27/2011	10:14:53 AM	Helium MFC set to  0.000000
11/27/2011	10:14:53 AM	H2 MFC set to  0.000000
11/27/2011	10:14:53 AM	BCl3 MFC set to  0.000000
11/27/2011	10:14:53 AM	PHl3 MFC set to  0.000000
11/27/2011	10:14:53 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:14:53 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:14:53 AM	Tube furnace set to 0
11/27/2011	10:14:56 AM	H2 valve closed
11/27/2011	10:14:56 AM	BCl3 valve closed
11/27/2011	10:14:56 AM	PH3 valve closed
11/27/2011	10:14:56 AM	SiCl4 pre valve closed
11/27/2011	10:14:56 AM	SiCl4 post valve closed
11/27/2011	10:14:56 AM	Main Vac valve closed
11/27/2011	10:14:56 AM	Bypass valve closed
11/27/2011	10:14:56 AM	Bubbler valve closed
11/27/2011	10:14:56 AM	Helium valve opened
11/27/2011	10:14:56 AM	Helium MFC set to  500.000000
11/27/2011	10:14:56 AM	H2 MFC set to  0.000000
11/27/2011	10:14:56 AM	BCl3 MFC set to  0.000000
11/27/2011	10:14:56 AM	PHl3 MFC set to  0.000000
11/27/2011	10:14:56 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:14:56 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:14:56 AM	Tube furnace set to 0
11/27/2011	10:15:58 AM	Helium valve closed
11/27/2011	10:15:58 AM	H2 valve closed
11/27/2011	10:15:58 AM	BCl3 valve closed
11/27/2011	10:15:58 AM	PH3 valve closed
11/27/2011	10:15:58 AM	SiCl4 pre valve closed
11/27/2011	10:15:58 AM	SiCl4 post valve closed
11/27/2011	10:15:58 AM	Main Vac valve closed
11/27/2011	10:15:58 AM	Bypass valve closed
11/27/2011	10:15:58 AM	Bubbler valve closed
11/27/2011	10:15:58 AM	Helium MFC set to  0.000000
11/27/2011	10:15:58 AM	H2 MFC set to  0.000000
11/27/2011	10:15:58 AM	BCl3 MFC set to  0.000000
11/27/2011	10:15:58 AM	PHl3 MFC set to  0.000000
11/27/2011	10:15:58 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:15:58 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:15:58 AM	Tube furnace set to 0
11/27/2011	10:15:59 AM	Run finished at 10:15 AM
11/27/2011	10:15:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	10:26:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	10:26:40 AM	Recipe started at 10:26 AM
11/27/2011	10:26:40 AM	Helium valve closed
11/27/2011	10:26:40 AM	H2 valve closed
11/27/2011	10:26:40 AM	BCl3 valve closed
11/27/2011	10:26:40 AM	PH3 valve closed
11/27/2011	10:26:40 AM	SiCl4 pre valve closed
11/27/2011	10:26:40 AM	SiCl4 post valve closed
11/27/2011	10:26:40 AM	Main Vac valve closed
11/27/2011	10:26:40 AM	Bubbler valve closed
11/27/2011	10:26:40 AM	Bypass valve opened
11/27/2011	10:26:40 AM	Helium MFC set to  0.000000
11/27/2011	10:26:40 AM	H2 MFC set to  0.000000
11/27/2011	10:26:40 AM	BCl3 MFC set to  0.000000
11/27/2011	10:26:40 AM	PHl3 MFC set to  0.000000
11/27/2011	10:26:40 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:26:40 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:26:40 AM	Tube furnace set to 0
11/27/2011	10:27:44 AM	Helium valve closed
11/27/2011	10:27:44 AM	H2 valve closed
11/27/2011	10:27:44 AM	BCl3 valve closed
11/27/2011	10:27:44 AM	PH3 valve closed
11/27/2011	10:27:44 AM	SiCl4 pre valve closed
11/27/2011	10:27:44 AM	SiCl4 post valve closed
11/27/2011	10:27:44 AM	Main Vac valve closed
11/27/2011	10:27:44 AM	Bubbler valve closed
11/27/2011	10:27:44 AM	Bypass valve opened
11/27/2011	10:27:44 AM	Helium MFC set to  0.000000
11/27/2011	10:27:44 AM	H2 MFC set to  0.000000
11/27/2011	10:27:44 AM	BCl3 MFC set to  0.000000
11/27/2011	10:27:44 AM	PHl3 MFC set to  0.000000
11/27/2011	10:27:44 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:27:44 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:27:44 AM	Tube furnace set to 0
11/27/2011	10:28:44 AM	Helium valve closed
11/27/2011	10:28:44 AM	H2 valve closed
11/27/2011	10:28:44 AM	BCl3 valve closed
11/27/2011	10:28:44 AM	PH3 valve closed
11/27/2011	10:28:44 AM	SiCl4 pre valve closed
11/27/2011	10:28:44 AM	SiCl4 post valve closed
11/27/2011	10:28:44 AM	Bypass valve closed
11/27/2011	10:28:44 AM	Bubbler valve closed
11/27/2011	10:28:44 AM	Main Vac valve opened
11/27/2011	10:28:44 AM	Helium MFC set to  0.000000
11/27/2011	10:28:44 AM	H2 MFC set to  0.000000
11/27/2011	10:28:44 AM	BCl3 MFC set to  0.000000
11/27/2011	10:28:44 AM	PHl3 MFC set to  0.000000
11/27/2011	10:28:44 AM	SiCl4 MFC set to  0.000000
11/27/2011	10:28:44 AM	Bypass solenoid MFC set to  0.000000
11/27/2011	10:28:45 AM	Tube furnace set to 0
11/27/2011	10:28:46 AM	Run finished at 10:28 AM
11/27/2011	10:28:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	10:29:40 AM	Tube furnace set to 50
11/27/2011	12:34:29 PM	Main Vac valve closed
11/27/2011	12:35:23 PM	Main Vac valve opened
11/27/2011	12:37:51 PM	Recipe started at 12:37 PM
11/27/2011	12:37:51 PM	Helium valve closed
11/27/2011	12:37:51 PM	H2 valve closed
11/27/2011	12:37:51 PM	BCl3 valve closed
11/27/2011	12:37:51 PM	PH3 valve closed
11/27/2011	12:37:51 PM	SiCl4 pre valve closed
11/27/2011	12:37:51 PM	SiCl4 post valve closed
11/27/2011	12:37:51 PM	Main Vac valve closed
11/27/2011	12:37:51 PM	Bypass valve closed
11/27/2011	12:37:51 PM	Bubbler valve closed
11/27/2011	12:37:51 PM	Helium MFC set to  0.000000
11/27/2011	12:37:51 PM	H2 MFC set to  0.000000
11/27/2011	12:37:51 PM	BCl3 MFC set to  0.000000
11/27/2011	12:37:51 PM	PHl3 MFC set to  0.000000
11/27/2011	12:37:51 PM	SiCl4 MFC set to  0.000000
11/27/2011	12:37:51 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	12:37:51 PM	Tube furnace set to 0
11/27/2011	12:37:54 PM	Helium valve closed
11/27/2011	12:37:54 PM	BCl3 valve closed
11/27/2011	12:37:54 PM	PH3 valve closed
11/27/2011	12:37:54 PM	SiCl4 pre valve closed
11/27/2011	12:37:54 PM	SiCl4 post valve closed
11/27/2011	12:37:54 PM	Main Vac valve closed
11/27/2011	12:37:54 PM	Bypass valve closed
11/27/2011	12:37:54 PM	Bubbler valve closed
11/27/2011	12:37:54 PM	H2 valve opened
11/27/2011	12:37:54 PM	Helium MFC set to  0.000000
11/27/2011	12:37:54 PM	H2 MFC set to  500.000000
11/27/2011	12:37:54 PM	BCl3 MFC set to  0.000000
11/27/2011	12:37:54 PM	PHl3 MFC set to  0.000000
11/27/2011	12:37:54 PM	SiCl4 MFC set to  0.000000
11/27/2011	12:37:54 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	12:37:54 PM	Tube furnace set to 50
11/27/2011	12:39:03 PM	Helium valve closed
11/27/2011	12:39:03 PM	BCl3 valve closed
11/27/2011	12:39:03 PM	PH3 valve closed
11/27/2011	12:39:03 PM	SiCl4 pre valve closed
11/27/2011	12:39:03 PM	SiCl4 post valve closed
11/27/2011	12:39:03 PM	Main Vac valve closed
11/27/2011	12:39:03 PM	Bypass valve closed
11/27/2011	12:39:03 PM	H2 valve opened
11/27/2011	12:39:03 PM	Bubbler valve opened
11/27/2011	12:39:03 PM	Helium MFC set to  0.000000
11/27/2011	12:39:03 PM	H2 MFC set to  500.000000
11/27/2011	12:39:03 PM	BCl3 MFC set to  0.000000
11/27/2011	12:39:03 PM	PHl3 MFC set to  0.000000
11/27/2011	12:39:03 PM	SiCl4 MFC set to  0.000000
11/27/2011	12:39:03 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	12:39:03 PM	Tube furnace set to 50
11/27/2011	12:39:04 PM	Helium valve closed
11/27/2011	12:39:04 PM	BCl3 valve closed
11/27/2011	12:39:04 PM	PH3 valve closed
11/27/2011	12:39:04 PM	SiCl4 pre valve closed
11/27/2011	12:39:04 PM	SiCl4 post valve closed
11/27/2011	12:39:04 PM	Main Vac valve closed
11/27/2011	12:39:04 PM	Bypass valve closed
11/27/2011	12:39:04 PM	H2 valve opened
11/27/2011	12:39:04 PM	Bubbler valve opened
11/27/2011	12:39:04 PM	Helium MFC set to  0.000000
11/27/2011	12:39:04 PM	H2 MFC set to  450.000000
11/27/2011	12:39:04 PM	BCl3 MFC set to  0.000000
11/27/2011	12:39:04 PM	PHl3 MFC set to  0.000000
11/27/2011	12:39:04 PM	SiCl4 MFC set to  0.000000
11/27/2011	12:39:04 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	12:39:04 PM	Tube furnace set to 1000
11/27/2011	1:02:04 PM	Helium valve closed
11/27/2011	1:02:04 PM	PH3 valve closed
11/27/2011	1:02:04 PM	Main Vac valve closed
11/27/2011	1:02:04 PM	Bypass valve closed
11/27/2011	1:02:04 PM	H2 valve opened
11/27/2011	1:02:04 PM	BCl3 valve opened
11/27/2011	1:02:04 PM	SiCl4 pre valve opened
11/27/2011	1:02:04 PM	SiCl4 post valve opened
11/27/2011	1:02:04 PM	Bubbler valve opened
11/27/2011	1:02:04 PM	Helium MFC set to  0.000000
11/27/2011	1:02:04 PM	H2 MFC set to  450.000000
11/27/2011	1:02:04 PM	BCl3 MFC set to  1.000000
11/27/2011	1:02:04 PM	PHl3 MFC set to  0.000000
11/27/2011	1:02:04 PM	SiCl4 MFC set to  50.000000
11/27/2011	1:02:04 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	1:02:04 PM	Tube furnace set to 1000
11/27/2011	1:24:04 PM	Helium valve closed
11/27/2011	1:24:04 PM	BCl3 valve closed
11/27/2011	1:24:04 PM	PH3 valve closed
11/27/2011	1:24:04 PM	SiCl4 pre valve closed
11/27/2011	1:24:04 PM	SiCl4 post valve closed
11/27/2011	1:24:04 PM	Main Vac valve closed
11/27/2011	1:24:04 PM	Bypass valve closed
11/27/2011	1:24:04 PM	H2 valve opened
11/27/2011	1:24:04 PM	Bubbler valve opened
11/27/2011	1:24:04 PM	Helium MFC set to  0.000000
11/27/2011	1:24:04 PM	H2 MFC set to  500.000000
11/27/2011	1:24:04 PM	BCl3 MFC set to  0.000000
11/27/2011	1:24:04 PM	PHl3 MFC set to  0.000000
11/27/2011	1:24:04 PM	SiCl4 MFC set to  0.000000
11/27/2011	1:24:04 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	1:24:04 PM	Tube furnace set to 750
11/27/2011	1:34:04 PM	H2 valve closed
11/27/2011	1:34:04 PM	BCl3 valve closed
11/27/2011	1:34:04 PM	PH3 valve closed
11/27/2011	1:34:04 PM	SiCl4 pre valve closed
11/27/2011	1:34:04 PM	SiCl4 post valve closed
11/27/2011	1:34:04 PM	Main Vac valve closed
11/27/2011	1:34:04 PM	Bypass valve closed
11/27/2011	1:34:04 PM	Helium valve opened
11/27/2011	1:34:04 PM	Bubbler valve opened
11/27/2011	1:34:04 PM	Helium MFC set to  400.000000
11/27/2011	1:34:04 PM	H2 MFC set to  0.000000
11/27/2011	1:34:04 PM	BCl3 MFC set to  0.000000
11/27/2011	1:34:04 PM	PHl3 MFC set to  0.000000
11/27/2011	1:34:04 PM	SiCl4 MFC set to  0.000000
11/27/2011	1:34:04 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	1:34:04 PM	Tube furnace set to 0
11/27/2011	1:59:04 PM	Helium valve closed
11/27/2011	1:59:04 PM	H2 valve closed
11/27/2011	1:59:04 PM	BCl3 valve closed
11/27/2011	1:59:04 PM	PH3 valve closed
11/27/2011	1:59:04 PM	SiCl4 pre valve closed
11/27/2011	1:59:04 PM	SiCl4 post valve closed
11/27/2011	1:59:04 PM	Main Vac valve closed
11/27/2011	1:59:04 PM	Bypass valve closed
11/27/2011	1:59:04 PM	Bubbler valve closed
11/27/2011	1:59:04 PM	Helium MFC set to  0.000000
11/27/2011	1:59:04 PM	H2 MFC set to  0.000000
11/27/2011	1:59:04 PM	BCl3 MFC set to  0.000000
11/27/2011	1:59:04 PM	PHl3 MFC set to  0.000000
11/27/2011	1:59:04 PM	SiCl4 MFC set to  0.000000
11/27/2011	1:59:04 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	1:59:04 PM	Tube furnace set to 50
11/27/2011	2:04:04 PM	Helium valve closed
11/27/2011	2:04:04 PM	H2 valve closed
11/27/2011	2:04:04 PM	BCl3 valve closed
11/27/2011	2:04:04 PM	PH3 valve closed
11/27/2011	2:04:04 PM	SiCl4 pre valve closed
11/27/2011	2:04:04 PM	SiCl4 post valve closed
11/27/2011	2:04:04 PM	Main Vac valve closed
11/27/2011	2:04:04 PM	Bubbler valve closed
11/27/2011	2:04:04 PM	Bypass valve opened
11/27/2011	2:04:04 PM	Helium MFC set to  0.000000
11/27/2011	2:04:04 PM	H2 MFC set to  0.000000
11/27/2011	2:04:04 PM	BCl3 MFC set to  0.000000
11/27/2011	2:04:05 PM	PHl3 MFC set to  0.000000
11/27/2011	2:04:05 PM	SiCl4 MFC set to  0.000000
11/27/2011	2:04:05 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	2:04:05 PM	Tube furnace set to 0
11/27/2011	2:09:05 PM	Helium valve closed
11/27/2011	2:09:05 PM	H2 valve closed
11/27/2011	2:09:05 PM	BCl3 valve closed
11/27/2011	2:09:05 PM	PH3 valve closed
11/27/2011	2:09:05 PM	SiCl4 pre valve closed
11/27/2011	2:09:05 PM	SiCl4 post valve closed
11/27/2011	2:09:05 PM	Bypass valve closed
11/27/2011	2:09:05 PM	Bubbler valve closed
11/27/2011	2:09:05 PM	Main Vac valve opened
11/27/2011	2:09:05 PM	Helium MFC set to  0.000000
11/27/2011	2:09:05 PM	H2 MFC set to  0.000000
11/27/2011	2:09:05 PM	BCl3 MFC set to  0.000000
11/27/2011	2:09:05 PM	PHl3 MFC set to  0.000000
11/27/2011	2:09:05 PM	SiCl4 MFC set to  0.000000
11/27/2011	2:09:05 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	2:09:05 PM	Tube furnace set to 0
11/27/2011	2:09:06 PM	Run finished at 2:09 PM
11/27/2011	3:12:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	3:12:29 PM	Recipe started at 3:12 PM
11/27/2011	3:12:29 PM	Helium valve closed
11/27/2011	3:12:29 PM	H2 valve closed
11/27/2011	3:12:29 PM	BCl3 valve closed
11/27/2011	3:12:29 PM	PH3 valve closed
11/27/2011	3:12:29 PM	SiCl4 pre valve closed
11/27/2011	3:12:29 PM	SiCl4 post valve closed
11/27/2011	3:12:29 PM	Main Vac valve closed
11/27/2011	3:12:29 PM	Bypass valve closed
11/27/2011	3:12:29 PM	Bubbler valve closed
11/27/2011	3:12:29 PM	Helium MFC set to  0.000000
11/27/2011	3:12:29 PM	H2 MFC set to  0.000000
11/27/2011	3:12:29 PM	BCl3 MFC set to  0.000000
11/27/2011	3:12:29 PM	PHl3 MFC set to  0.000000
11/27/2011	3:12:29 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:12:29 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:12:29 PM	Tube furnace set to 0
11/27/2011	3:12:32 PM	H2 valve closed
11/27/2011	3:12:32 PM	BCl3 valve closed
11/27/2011	3:12:32 PM	PH3 valve closed
11/27/2011	3:12:32 PM	SiCl4 pre valve closed
11/27/2011	3:12:32 PM	SiCl4 post valve closed
11/27/2011	3:12:32 PM	Main Vac valve closed
11/27/2011	3:12:32 PM	Bypass valve closed
11/27/2011	3:12:32 PM	Bubbler valve closed
11/27/2011	3:12:32 PM	Helium valve opened
11/27/2011	3:12:32 PM	Helium MFC set to  500.000000
11/27/2011	3:12:32 PM	H2 MFC set to  0.000000
11/27/2011	3:12:32 PM	BCl3 MFC set to  0.000000
11/27/2011	3:12:32 PM	PHl3 MFC set to  0.000000
11/27/2011	3:12:32 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:12:32 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:12:32 PM	Tube furnace set to 0
11/27/2011	3:13:38 PM	Helium valve closed
11/27/2011	3:13:38 PM	H2 valve closed
11/27/2011	3:13:38 PM	BCl3 valve closed
11/27/2011	3:13:38 PM	PH3 valve closed
11/27/2011	3:13:38 PM	SiCl4 pre valve closed
11/27/2011	3:13:38 PM	SiCl4 post valve closed
11/27/2011	3:13:38 PM	Main Vac valve closed
11/27/2011	3:13:38 PM	Bypass valve closed
11/27/2011	3:13:38 PM	Bubbler valve closed
11/27/2011	3:13:38 PM	Helium MFC set to  0.000000
11/27/2011	3:13:38 PM	H2 MFC set to  0.000000
11/27/2011	3:13:38 PM	BCl3 MFC set to  0.000000
11/27/2011	3:13:38 PM	PHl3 MFC set to  0.000000
11/27/2011	3:13:38 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:13:38 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:13:38 PM	Tube furnace set to 0
11/27/2011	3:13:39 PM	Run finished at 3:13 PM
11/27/2011	3:13:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	3:14:18 PM	Helium MFC set to  100.000000
11/27/2011	3:14:20 PM	Helium valve opened
11/27/2011	3:14:26 PM	Helium valve closed
11/27/2011	3:14:29 PM	Helium MFC set to  0.000000
11/27/2011	3:16:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	3:16:39 PM	Recipe started at 3:16 PM
11/27/2011	3:16:39 PM	Helium valve closed
11/27/2011	3:16:39 PM	H2 valve closed
11/27/2011	3:16:39 PM	BCl3 valve closed
11/27/2011	3:16:39 PM	PH3 valve closed
11/27/2011	3:16:39 PM	SiCl4 pre valve closed
11/27/2011	3:16:39 PM	SiCl4 post valve closed
11/27/2011	3:16:39 PM	Main Vac valve closed
11/27/2011	3:16:39 PM	Bubbler valve closed
11/27/2011	3:16:39 PM	Bypass valve opened
11/27/2011	3:16:39 PM	Helium MFC set to  0.000000
11/27/2011	3:16:39 PM	H2 MFC set to  0.000000
11/27/2011	3:16:39 PM	BCl3 MFC set to  0.000000
11/27/2011	3:16:39 PM	PHl3 MFC set to  0.000000
11/27/2011	3:16:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:16:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:16:39 PM	Tube furnace set to 0
11/27/2011	3:17:39 PM	Helium valve closed
11/27/2011	3:17:39 PM	H2 valve closed
11/27/2011	3:17:39 PM	BCl3 valve closed
11/27/2011	3:17:39 PM	PH3 valve closed
11/27/2011	3:17:39 PM	SiCl4 pre valve closed
11/27/2011	3:17:39 PM	SiCl4 post valve closed
11/27/2011	3:17:39 PM	Main Vac valve closed
11/27/2011	3:17:39 PM	Bubbler valve closed
11/27/2011	3:17:39 PM	Bypass valve opened
11/27/2011	3:17:39 PM	Helium MFC set to  0.000000
11/27/2011	3:17:39 PM	H2 MFC set to  0.000000
11/27/2011	3:17:39 PM	BCl3 MFC set to  0.000000
11/27/2011	3:17:39 PM	PHl3 MFC set to  0.000000
11/27/2011	3:17:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:17:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:17:39 PM	Tube furnace set to 0
11/27/2011	3:18:39 PM	Helium valve closed
11/27/2011	3:18:39 PM	H2 valve closed
11/27/2011	3:18:39 PM	BCl3 valve closed
11/27/2011	3:18:39 PM	PH3 valve closed
11/27/2011	3:18:39 PM	SiCl4 pre valve closed
11/27/2011	3:18:39 PM	SiCl4 post valve closed
11/27/2011	3:18:39 PM	Bypass valve closed
11/27/2011	3:18:39 PM	Bubbler valve closed
11/27/2011	3:18:39 PM	Main Vac valve opened
11/27/2011	3:18:39 PM	Helium MFC set to  0.000000
11/27/2011	3:18:39 PM	H2 MFC set to  0.000000
11/27/2011	3:18:39 PM	BCl3 MFC set to  0.000000
11/27/2011	3:18:39 PM	PHl3 MFC set to  0.000000
11/27/2011	3:18:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	3:18:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	3:18:39 PM	Tube furnace set to 0
11/27/2011	3:18:40 PM	Run finished at 3:18 PM
11/27/2011	3:18:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	4:09:43 PM	Main Vac valve closed
11/27/2011	4:10:39 PM	Main Vac valve opened
11/27/2011	4:10:57 PM	Helium MFC set to  20.000000
11/27/2011	4:10:58 PM	Helium valve opened
11/27/2011	4:11:19 PM	Helium valve closed
11/27/2011	4:11:21 PM	Helium MFC set to  0.000000
11/27/2011	4:11:39 PM	Tube furnace set to 70
11/27/2011	4:12:25 PM	Recipe started at 4:12 PM
11/27/2011	4:12:25 PM	Helium valve closed
11/27/2011	4:12:25 PM	H2 valve closed
11/27/2011	4:12:25 PM	BCl3 valve closed
11/27/2011	4:12:26 PM	PH3 valve closed
11/27/2011	4:12:26 PM	SiCl4 pre valve closed
11/27/2011	4:12:26 PM	SiCl4 post valve closed
11/27/2011	4:12:26 PM	Main Vac valve closed
11/27/2011	4:12:26 PM	Bypass valve closed
11/27/2011	4:12:26 PM	Bubbler valve closed
11/27/2011	4:12:26 PM	Helium MFC set to  0.000000
11/27/2011	4:12:26 PM	H2 MFC set to  0.000000
11/27/2011	4:12:26 PM	BCl3 MFC set to  0.000000
11/27/2011	4:12:26 PM	PHl3 MFC set to  0.000000
11/27/2011	4:12:26 PM	SiCl4 MFC set to  0.000000
11/27/2011	4:12:26 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:12:26 PM	Tube furnace set to 0
11/27/2011	4:12:29 PM	Helium valve closed
11/27/2011	4:12:29 PM	BCl3 valve closed
11/27/2011	4:12:29 PM	PH3 valve closed
11/27/2011	4:12:29 PM	SiCl4 pre valve closed
11/27/2011	4:12:29 PM	SiCl4 post valve closed
11/27/2011	4:12:29 PM	Main Vac valve closed
11/27/2011	4:12:29 PM	Bypass valve closed
11/27/2011	4:12:29 PM	Bubbler valve closed
11/27/2011	4:12:29 PM	H2 valve opened
11/27/2011	4:12:29 PM	Helium MFC set to  0.000000
11/27/2011	4:12:29 PM	H2 MFC set to  500.000000
11/27/2011	4:12:29 PM	BCl3 MFC set to  0.000000
11/27/2011	4:12:29 PM	PHl3 MFC set to  0.000000
11/27/2011	4:12:29 PM	SiCl4 MFC set to  0.000000
11/27/2011	4:12:29 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:12:29 PM	Tube furnace set to 50
11/27/2011	4:13:37 PM	Helium valve closed
11/27/2011	4:13:37 PM	BCl3 valve closed
11/27/2011	4:13:37 PM	PH3 valve closed
11/27/2011	4:13:37 PM	SiCl4 pre valve closed
11/27/2011	4:13:37 PM	SiCl4 post valve closed
11/27/2011	4:13:37 PM	Main Vac valve closed
11/27/2011	4:13:37 PM	Bypass valve closed
11/27/2011	4:13:37 PM	H2 valve opened
11/27/2011	4:13:37 PM	Bubbler valve opened
11/27/2011	4:13:37 PM	Helium MFC set to  0.000000
11/27/2011	4:13:37 PM	H2 MFC set to  500.000000
11/27/2011	4:13:37 PM	BCl3 MFC set to  0.000000
11/27/2011	4:13:37 PM	PHl3 MFC set to  0.000000
11/27/2011	4:13:37 PM	SiCl4 MFC set to  0.000000
11/27/2011	4:13:37 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:13:37 PM	Tube furnace set to 50
11/27/2011	4:13:38 PM	Helium valve closed
11/27/2011	4:13:38 PM	BCl3 valve closed
11/27/2011	4:13:38 PM	PH3 valve closed
11/27/2011	4:13:38 PM	SiCl4 pre valve closed
11/27/2011	4:13:38 PM	SiCl4 post valve closed
11/27/2011	4:13:38 PM	Main Vac valve closed
11/27/2011	4:13:38 PM	Bypass valve closed
11/27/2011	4:13:38 PM	H2 valve opened
11/27/2011	4:13:38 PM	Bubbler valve opened
11/27/2011	4:13:38 PM	Helium MFC set to  0.000000
11/27/2011	4:13:38 PM	H2 MFC set to  450.000000
11/27/2011	4:13:38 PM	BCl3 MFC set to  0.000000
11/27/2011	4:13:38 PM	PHl3 MFC set to  0.000000
11/27/2011	4:13:38 PM	SiCl4 MFC set to  0.000000
11/27/2011	4:13:38 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:13:39 PM	Tube furnace set to 1000
11/27/2011	4:36:39 PM	Helium valve closed
11/27/2011	4:36:39 PM	PH3 valve closed
11/27/2011	4:36:39 PM	Main Vac valve closed
11/27/2011	4:36:39 PM	Bypass valve closed
11/27/2011	4:36:39 PM	H2 valve opened
11/27/2011	4:36:39 PM	BCl3 valve opened
11/27/2011	4:36:39 PM	SiCl4 pre valve opened
11/27/2011	4:36:39 PM	SiCl4 post valve opened
11/27/2011	4:36:39 PM	Bubbler valve opened
11/27/2011	4:36:39 PM	Helium MFC set to  0.000000
11/27/2011	4:36:39 PM	H2 MFC set to  450.000000
11/27/2011	4:36:39 PM	BCl3 MFC set to  1.000000
11/27/2011	4:36:39 PM	PHl3 MFC set to  0.000000
11/27/2011	4:36:39 PM	SiCl4 MFC set to  50.000000
11/27/2011	4:36:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:36:39 PM	Tube furnace set to 1000
11/27/2011	4:56:39 PM	Helium valve closed
11/27/2011	4:56:39 PM	BCl3 valve closed
11/27/2011	4:56:39 PM	PH3 valve closed
11/27/2011	4:56:39 PM	SiCl4 pre valve closed
11/27/2011	4:56:39 PM	SiCl4 post valve closed
11/27/2011	4:56:39 PM	Main Vac valve closed
11/27/2011	4:56:39 PM	Bypass valve closed
11/27/2011	4:56:39 PM	H2 valve opened
11/27/2011	4:56:39 PM	Bubbler valve opened
11/27/2011	4:56:39 PM	Helium MFC set to  0.000000
11/27/2011	4:56:39 PM	H2 MFC set to  500.000000
11/27/2011	4:56:39 PM	BCl3 MFC set to  0.000000
11/27/2011	4:56:39 PM	PHl3 MFC set to  0.000000
11/27/2011	4:56:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	4:56:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	4:56:39 PM	Tube furnace set to 750
11/27/2011	5:06:39 PM	H2 valve closed
11/27/2011	5:06:39 PM	BCl3 valve closed
11/27/2011	5:06:39 PM	PH3 valve closed
11/27/2011	5:06:39 PM	SiCl4 pre valve closed
11/27/2011	5:06:39 PM	SiCl4 post valve closed
11/27/2011	5:06:39 PM	Main Vac valve closed
11/27/2011	5:06:39 PM	Bypass valve closed
11/27/2011	5:06:39 PM	Helium valve opened
11/27/2011	5:06:39 PM	Bubbler valve opened
11/27/2011	5:06:39 PM	Helium MFC set to  400.000000
11/27/2011	5:06:39 PM	H2 MFC set to  0.000000
11/27/2011	5:06:39 PM	BCl3 MFC set to  0.000000
11/27/2011	5:06:39 PM	PHl3 MFC set to  0.000000
11/27/2011	5:06:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:06:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	5:06:39 PM	Tube furnace set to 0
11/27/2011	5:31:39 PM	Helium valve closed
11/27/2011	5:31:39 PM	H2 valve closed
11/27/2011	5:31:39 PM	BCl3 valve closed
11/27/2011	5:31:39 PM	PH3 valve closed
11/27/2011	5:31:39 PM	SiCl4 pre valve closed
11/27/2011	5:31:39 PM	SiCl4 post valve closed
11/27/2011	5:31:39 PM	Main Vac valve closed
11/27/2011	5:31:39 PM	Bypass valve closed
11/27/2011	5:31:39 PM	Bubbler valve closed
11/27/2011	5:31:39 PM	Helium MFC set to  0.000000
11/27/2011	5:31:39 PM	H2 MFC set to  0.000000
11/27/2011	5:31:39 PM	BCl3 MFC set to  0.000000
11/27/2011	5:31:39 PM	PHl3 MFC set to  0.000000
11/27/2011	5:31:39 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:31:39 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	5:31:39 PM	Tube furnace set to 50
11/27/2011	5:31:49 PM	Run aborted at 5:31 PM
11/27/2011	5:31:49 PM	Helium valve closed
11/27/2011	5:31:49 PM	H2 valve closed
11/27/2011	5:31:49 PM	BCl3 valve closed
11/27/2011	5:31:49 PM	PH3 valve closed
11/27/2011	5:31:49 PM	SiCl4 pre valve closed
11/27/2011	5:31:49 PM	SiCl4 post valve closed
11/27/2011	5:31:49 PM	Bypass valve closed
11/27/2011	5:31:49 PM	Main Vac valve closed
11/27/2011	5:31:49 PM	Bubbler valve closed
11/27/2011	5:31:49 PM	Helium MFC set to  0.000000
11/27/2011	5:31:49 PM	H2 MFC set to  0.000000
11/27/2011	5:31:49 PM	BCl3 MFC set to  0.000000
11/27/2011	5:31:49 PM	PHl3 MFC set to  0.000000
11/27/2011	5:31:49 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:31:49 PM	Tube furnace set to 0
11/27/2011	5:31:56 PM	Bypass valve opened
11/27/2011	5:31:59 PM	Bypass valve closed
11/27/2011	5:32:04 PM	Helium MFC set to  500.000000
11/27/2011	5:32:05 PM	Helium valve opened
11/27/2011	5:32:46 PM	Helium valve closed
11/27/2011	5:32:50 PM	Helium MFC set to  0.000000
11/27/2011	5:36:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	5:36:06 PM	Recipe started at 5:36 PM
11/27/2011	5:36:06 PM	Helium valve closed
11/27/2011	5:36:06 PM	H2 valve closed
11/27/2011	5:36:06 PM	BCl3 valve closed
11/27/2011	5:36:06 PM	PH3 valve closed
11/27/2011	5:36:06 PM	SiCl4 pre valve closed
11/27/2011	5:36:06 PM	SiCl4 post valve closed
11/27/2011	5:36:06 PM	Main Vac valve closed
11/27/2011	5:36:06 PM	Bubbler valve closed
11/27/2011	5:36:07 PM	Bypass valve opened
11/27/2011	5:36:07 PM	Helium MFC set to  0.000000
11/27/2011	5:36:07 PM	H2 MFC set to  0.000000
11/27/2011	5:36:07 PM	BCl3 MFC set to  0.000000
11/27/2011	5:36:07 PM	PHl3 MFC set to  0.000000
11/27/2011	5:36:07 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:36:07 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	5:36:07 PM	Tube furnace set to 0
11/27/2011	5:37:08 PM	Helium valve closed
11/27/2011	5:37:08 PM	H2 valve closed
11/27/2011	5:37:08 PM	BCl3 valve closed
11/27/2011	5:37:08 PM	PH3 valve closed
11/27/2011	5:37:08 PM	SiCl4 pre valve closed
11/27/2011	5:37:08 PM	SiCl4 post valve closed
11/27/2011	5:37:08 PM	Main Vac valve closed
11/27/2011	5:37:08 PM	Bubbler valve closed
11/27/2011	5:37:08 PM	Bypass valve opened
11/27/2011	5:37:08 PM	Helium MFC set to  0.000000
11/27/2011	5:37:08 PM	H2 MFC set to  0.000000
11/27/2011	5:37:08 PM	BCl3 MFC set to  0.000000
11/27/2011	5:37:08 PM	PHl3 MFC set to  0.000000
11/27/2011	5:37:08 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:37:08 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	5:37:09 PM	Tube furnace set to 0
11/27/2011	5:38:09 PM	Helium valve closed
11/27/2011	5:38:09 PM	H2 valve closed
11/27/2011	5:38:09 PM	BCl3 valve closed
11/27/2011	5:38:09 PM	PH3 valve closed
11/27/2011	5:38:09 PM	SiCl4 pre valve closed
11/27/2011	5:38:09 PM	SiCl4 post valve closed
11/27/2011	5:38:09 PM	Bypass valve closed
11/27/2011	5:38:09 PM	Bubbler valve closed
11/27/2011	5:38:09 PM	Main Vac valve opened
11/27/2011	5:38:09 PM	Helium MFC set to  0.000000
11/27/2011	5:38:09 PM	H2 MFC set to  0.000000
11/27/2011	5:38:09 PM	BCl3 MFC set to  0.000000
11/27/2011	5:38:09 PM	PHl3 MFC set to  0.000000
11/27/2011	5:38:09 PM	SiCl4 MFC set to  0.000000
11/27/2011	5:38:09 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	5:38:09 PM	Tube furnace set to 0
11/27/2011	5:38:10 PM	Run finished at 5:38 PM
11/27/2011	5:38:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	6:31:32 PM	Helium MFC set to  20.000000
11/27/2011	6:31:33 PM	Helium valve opened
11/27/2011	6:32:05 PM	Helium MFC set to  0.000000
11/27/2011	6:32:06 PM	Helium valve closed
11/27/2011	6:32:28 PM	Main Vac valve closed
11/27/2011	6:33:14 PM	Main Vac valve opened
11/27/2011	6:33:32 PM	Main Vac valve closed
11/27/2011	6:33:55 PM	Main Vac valve opened
11/27/2011	6:34:32 PM	Recipe started at 6:34 PM
11/27/2011	6:34:32 PM	Helium valve closed
11/27/2011	6:34:32 PM	H2 valve closed
11/27/2011	6:34:32 PM	BCl3 valve closed
11/27/2011	6:34:32 PM	PH3 valve closed
11/27/2011	6:34:32 PM	SiCl4 pre valve closed
11/27/2011	6:34:32 PM	SiCl4 post valve closed
11/27/2011	6:34:32 PM	Main Vac valve closed
11/27/2011	6:34:32 PM	Bypass valve closed
11/27/2011	6:34:32 PM	Bubbler valve closed
11/27/2011	6:34:32 PM	Helium MFC set to  0.000000
11/27/2011	6:34:32 PM	H2 MFC set to  0.000000
11/27/2011	6:34:32 PM	BCl3 MFC set to  0.000000
11/27/2011	6:34:32 PM	PHl3 MFC set to  0.000000
11/27/2011	6:34:32 PM	SiCl4 MFC set to  0.000000
11/27/2011	6:34:32 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	6:34:32 PM	Tube furnace set to 0
11/27/2011	6:34:35 PM	Helium valve closed
11/27/2011	6:34:35 PM	BCl3 valve closed
11/27/2011	6:34:35 PM	PH3 valve closed
11/27/2011	6:34:35 PM	SiCl4 pre valve closed
11/27/2011	6:34:35 PM	SiCl4 post valve closed
11/27/2011	6:34:35 PM	Main Vac valve closed
11/27/2011	6:34:35 PM	Bypass valve closed
11/27/2011	6:34:35 PM	Bubbler valve closed
11/27/2011	6:34:35 PM	H2 valve opened
11/27/2011	6:34:35 PM	Helium MFC set to  0.000000
11/27/2011	6:34:35 PM	H2 MFC set to  500.000000
11/27/2011	6:34:35 PM	BCl3 MFC set to  0.000000
11/27/2011	6:34:35 PM	PHl3 MFC set to  0.000000
11/27/2011	6:34:35 PM	SiCl4 MFC set to  0.000000
11/27/2011	6:34:35 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	6:34:35 PM	Tube furnace set to 50
11/27/2011	6:35:41 PM	Helium valve closed
11/27/2011	6:35:41 PM	BCl3 valve closed
11/27/2011	6:35:41 PM	PH3 valve closed
11/27/2011	6:35:41 PM	SiCl4 pre valve closed
11/27/2011	6:35:41 PM	SiCl4 post valve closed
11/27/2011	6:35:41 PM	Main Vac valve closed
11/27/2011	6:35:41 PM	Bypass valve closed
11/27/2011	6:35:41 PM	H2 valve opened
11/27/2011	6:35:41 PM	Bubbler valve opened
11/27/2011	6:35:41 PM	Helium MFC set to  0.000000
11/27/2011	6:35:41 PM	H2 MFC set to  500.000000
11/27/2011	6:35:41 PM	BCl3 MFC set to  0.000000
11/27/2011	6:35:41 PM	PHl3 MFC set to  0.000000
11/27/2011	6:35:41 PM	SiCl4 MFC set to  0.000000
11/27/2011	6:35:41 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	6:35:41 PM	Tube furnace set to 50
11/27/2011	6:35:42 PM	Helium valve closed
11/27/2011	6:35:42 PM	BCl3 valve closed
11/27/2011	6:35:42 PM	PH3 valve closed
11/27/2011	6:35:42 PM	SiCl4 pre valve closed
11/27/2011	6:35:42 PM	SiCl4 post valve closed
11/27/2011	6:35:42 PM	Main Vac valve closed
11/27/2011	6:35:42 PM	Bypass valve closed
11/27/2011	6:35:42 PM	H2 valve opened
11/27/2011	6:35:42 PM	Bubbler valve opened
11/27/2011	6:35:42 PM	Helium MFC set to  0.000000
11/27/2011	6:35:42 PM	H2 MFC set to  450.000000
11/27/2011	6:35:42 PM	BCl3 MFC set to  0.000000
11/27/2011	6:35:42 PM	PHl3 MFC set to  0.000000
11/27/2011	6:35:42 PM	SiCl4 MFC set to  0.000000
11/27/2011	6:35:42 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	6:35:42 PM	Tube furnace set to 1000
11/27/2011	6:57:42 PM	Helium valve closed
11/27/2011	6:57:42 PM	PH3 valve closed
11/27/2011	6:57:42 PM	Main Vac valve closed
11/27/2011	6:57:42 PM	Bypass valve closed
11/27/2011	6:57:42 PM	H2 valve opened
11/27/2011	6:57:42 PM	BCl3 valve opened
11/27/2011	6:57:42 PM	SiCl4 pre valve opened
11/27/2011	6:57:42 PM	SiCl4 post valve opened
11/27/2011	6:57:42 PM	Bubbler valve opened
11/27/2011	6:57:42 PM	Helium MFC set to  0.000000
11/27/2011	6:57:42 PM	H2 MFC set to  450.000000
11/27/2011	6:57:42 PM	BCl3 MFC set to  1.000000
11/27/2011	6:57:42 PM	PHl3 MFC set to  0.000000
11/27/2011	6:57:42 PM	SiCl4 MFC set to  50.000000
11/27/2011	6:57:42 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	6:57:42 PM	Tube furnace set to 1000
11/27/2011	7:17:42 PM	Helium valve closed
11/27/2011	7:17:42 PM	BCl3 valve closed
11/27/2011	7:17:42 PM	PH3 valve closed
11/27/2011	7:17:42 PM	SiCl4 pre valve closed
11/27/2011	7:17:42 PM	SiCl4 post valve closed
11/27/2011	7:17:42 PM	Main Vac valve closed
11/27/2011	7:17:42 PM	Bypass valve closed
11/27/2011	7:17:42 PM	H2 valve opened
11/27/2011	7:17:42 PM	Bubbler valve opened
11/27/2011	7:17:42 PM	Helium MFC set to  0.000000
11/27/2011	7:17:42 PM	H2 MFC set to  500.000000
11/27/2011	7:17:42 PM	BCl3 MFC set to  0.000000
11/27/2011	7:17:42 PM	PHl3 MFC set to  0.000000
11/27/2011	7:17:42 PM	SiCl4 MFC set to  0.000000
11/27/2011	7:17:42 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:17:43 PM	Tube furnace set to 750
11/27/2011	7:27:42 PM	H2 valve closed
11/27/2011	7:27:43 PM	BCl3 valve closed
11/27/2011	7:27:43 PM	PH3 valve closed
11/27/2011	7:27:43 PM	SiCl4 pre valve closed
11/27/2011	7:27:43 PM	SiCl4 post valve closed
11/27/2011	7:27:43 PM	Main Vac valve closed
11/27/2011	7:27:43 PM	Bypass valve closed
11/27/2011	7:27:43 PM	Helium valve opened
11/27/2011	7:27:43 PM	Bubbler valve opened
11/27/2011	7:27:43 PM	Helium MFC set to  400.000000
11/27/2011	7:27:43 PM	H2 MFC set to  0.000000
11/27/2011	7:27:43 PM	BCl3 MFC set to  0.000000
11/27/2011	7:27:43 PM	PHl3 MFC set to  0.000000
11/27/2011	7:27:43 PM	SiCl4 MFC set to  0.000000
11/27/2011	7:27:43 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:27:43 PM	Tube furnace set to 0
11/27/2011	7:52:43 PM	Helium valve closed
11/27/2011	7:52:43 PM	H2 valve closed
11/27/2011	7:52:43 PM	BCl3 valve closed
11/27/2011	7:52:43 PM	PH3 valve closed
11/27/2011	7:52:43 PM	SiCl4 pre valve closed
11/27/2011	7:52:43 PM	SiCl4 post valve closed
11/27/2011	7:52:43 PM	Main Vac valve closed
11/27/2011	7:52:43 PM	Bypass valve closed
11/27/2011	7:52:43 PM	Bubbler valve closed
11/27/2011	7:52:43 PM	Helium MFC set to  0.000000
11/27/2011	7:52:43 PM	H2 MFC set to  0.000000
11/27/2011	7:52:43 PM	BCl3 MFC set to  0.000000
11/27/2011	7:52:43 PM	PHl3 MFC set to  0.000000
11/27/2011	7:52:43 PM	SiCl4 MFC set to  0.000000
11/27/2011	7:52:43 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:52:43 PM	Tube furnace set to 50
11/27/2011	7:57:43 PM	Helium valve closed
11/27/2011	7:57:43 PM	H2 valve closed
11/27/2011	7:57:43 PM	BCl3 valve closed
11/27/2011	7:57:43 PM	PH3 valve closed
11/27/2011	7:57:43 PM	SiCl4 pre valve closed
11/27/2011	7:57:43 PM	SiCl4 post valve closed
11/27/2011	7:57:43 PM	Main Vac valve closed
11/27/2011	7:57:43 PM	Bubbler valve closed
11/27/2011	7:57:43 PM	Bypass valve opened
11/27/2011	7:57:43 PM	Helium MFC set to  0.000000
11/27/2011	7:57:43 PM	H2 MFC set to  0.000000
11/27/2011	7:57:43 PM	BCl3 MFC set to  0.000000
11/27/2011	7:57:43 PM	PHl3 MFC set to  0.000000
11/27/2011	7:57:43 PM	SiCl4 MFC set to  0.000000
11/27/2011	7:57:43 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	7:57:43 PM	Tube furnace set to 0
11/27/2011	8:02:43 PM	Helium valve closed
11/27/2011	8:02:43 PM	H2 valve closed
11/27/2011	8:02:43 PM	BCl3 valve closed
11/27/2011	8:02:43 PM	PH3 valve closed
11/27/2011	8:02:43 PM	SiCl4 pre valve closed
11/27/2011	8:02:43 PM	SiCl4 post valve closed
11/27/2011	8:02:43 PM	Bypass valve closed
11/27/2011	8:02:43 PM	Bubbler valve closed
11/27/2011	8:02:43 PM	Main Vac valve opened
11/27/2011	8:02:43 PM	Helium MFC set to  0.000000
11/27/2011	8:02:43 PM	H2 MFC set to  0.000000
11/27/2011	8:02:43 PM	BCl3 MFC set to  0.000000
11/27/2011	8:02:43 PM	PHl3 MFC set to  0.000000
11/27/2011	8:02:43 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:02:43 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:02:43 PM	Tube furnace set to 0
11/27/2011	8:02:44 PM	Run finished at 8:02 PM
11/27/2011	8:46:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	8:46:49 PM	Recipe started at 8:46 PM
11/27/2011	8:46:49 PM	Helium valve closed
11/27/2011	8:46:49 PM	H2 valve closed
11/27/2011	8:46:49 PM	BCl3 valve closed
11/27/2011	8:46:49 PM	PH3 valve closed
11/27/2011	8:46:49 PM	SiCl4 pre valve closed
11/27/2011	8:46:49 PM	SiCl4 post valve closed
11/27/2011	8:46:49 PM	Main Vac valve closed
11/27/2011	8:46:49 PM	Bypass valve closed
11/27/2011	8:46:49 PM	Bubbler valve closed
11/27/2011	8:46:49 PM	Helium MFC set to  0.000000
11/27/2011	8:46:49 PM	H2 MFC set to  0.000000
11/27/2011	8:46:49 PM	BCl3 MFC set to  0.000000
11/27/2011	8:46:49 PM	PHl3 MFC set to  0.000000
11/27/2011	8:46:49 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:46:49 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:46:49 PM	Tube furnace set to 0
11/27/2011	8:46:52 PM	H2 valve closed
11/27/2011	8:46:52 PM	BCl3 valve closed
11/27/2011	8:46:52 PM	PH3 valve closed
11/27/2011	8:46:52 PM	SiCl4 pre valve closed
11/27/2011	8:46:52 PM	SiCl4 post valve closed
11/27/2011	8:46:52 PM	Main Vac valve closed
11/27/2011	8:46:52 PM	Bypass valve closed
11/27/2011	8:46:52 PM	Bubbler valve closed
11/27/2011	8:46:52 PM	Helium valve opened
11/27/2011	8:46:52 PM	Helium MFC set to  500.000000
11/27/2011	8:46:52 PM	H2 MFC set to  0.000000
11/27/2011	8:46:52 PM	BCl3 MFC set to  0.000000
11/27/2011	8:46:52 PM	PHl3 MFC set to  0.000000
11/27/2011	8:46:52 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:46:52 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:46:52 PM	Tube furnace set to 0
11/27/2011	8:47:54 PM	Helium valve closed
11/27/2011	8:47:54 PM	H2 valve closed
11/27/2011	8:47:54 PM	BCl3 valve closed
11/27/2011	8:47:54 PM	PH3 valve closed
11/27/2011	8:47:54 PM	SiCl4 pre valve closed
11/27/2011	8:47:54 PM	SiCl4 post valve closed
11/27/2011	8:47:54 PM	Main Vac valve closed
11/27/2011	8:47:54 PM	Bypass valve closed
11/27/2011	8:47:54 PM	Bubbler valve closed
11/27/2011	8:47:54 PM	Helium MFC set to  0.000000
11/27/2011	8:47:54 PM	H2 MFC set to  0.000000
11/27/2011	8:47:54 PM	BCl3 MFC set to  0.000000
11/27/2011	8:47:54 PM	PHl3 MFC set to  0.000000
11/27/2011	8:47:54 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:47:54 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:47:54 PM	Tube furnace set to 0
11/27/2011	8:47:55 PM	Run finished at 8:47 PM
11/27/2011	8:47:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/27/2011	8:48:05 PM	Helium MFC set to  50.000000
11/27/2011	8:48:06 PM	Helium valve opened
11/27/2011	8:48:15 PM	Helium MFC set to  0.000000
11/27/2011	8:48:16 PM	Helium valve closed
11/27/2011	8:49:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/27/2011	8:49:51 PM	Recipe started at 8:49 PM
11/27/2011	8:49:51 PM	Helium valve closed
11/27/2011	8:49:51 PM	H2 valve closed
11/27/2011	8:49:51 PM	BCl3 valve closed
11/27/2011	8:49:51 PM	PH3 valve closed
11/27/2011	8:49:51 PM	SiCl4 pre valve closed
11/27/2011	8:49:51 PM	SiCl4 post valve closed
11/27/2011	8:49:51 PM	Main Vac valve closed
11/27/2011	8:49:51 PM	Bubbler valve closed
11/27/2011	8:49:51 PM	Bypass valve opened
11/27/2011	8:49:51 PM	Helium MFC set to  0.000000
11/27/2011	8:49:51 PM	H2 MFC set to  0.000000
11/27/2011	8:49:51 PM	BCl3 MFC set to  0.000000
11/27/2011	8:49:51 PM	PHl3 MFC set to  0.000000
11/27/2011	8:49:51 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:49:51 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:49:51 PM	Tube furnace set to 0
11/27/2011	8:50:50 PM	Helium valve closed
11/27/2011	8:50:50 PM	H2 valve closed
11/27/2011	8:50:50 PM	BCl3 valve closed
11/27/2011	8:50:50 PM	PH3 valve closed
11/27/2011	8:50:50 PM	SiCl4 pre valve closed
11/27/2011	8:50:50 PM	SiCl4 post valve closed
11/27/2011	8:50:50 PM	Main Vac valve closed
11/27/2011	8:50:50 PM	Bubbler valve closed
11/27/2011	8:50:50 PM	Bypass valve opened
11/27/2011	8:50:50 PM	Helium MFC set to  0.000000
11/27/2011	8:50:50 PM	H2 MFC set to  0.000000
11/27/2011	8:50:50 PM	BCl3 MFC set to  0.000000
11/27/2011	8:50:50 PM	PHl3 MFC set to  0.000000
11/27/2011	8:50:50 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:50:50 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:50:50 PM	Tube furnace set to 0
11/27/2011	8:51:50 PM	Helium valve closed
11/27/2011	8:51:50 PM	H2 valve closed
11/27/2011	8:51:50 PM	BCl3 valve closed
11/27/2011	8:51:50 PM	PH3 valve closed
11/27/2011	8:51:50 PM	SiCl4 pre valve closed
11/27/2011	8:51:50 PM	SiCl4 post valve closed
11/27/2011	8:51:50 PM	Bypass valve closed
11/27/2011	8:51:50 PM	Bubbler valve closed
11/27/2011	8:51:50 PM	Main Vac valve opened
11/27/2011	8:51:50 PM	Helium MFC set to  0.000000
11/27/2011	8:51:50 PM	H2 MFC set to  0.000000
11/27/2011	8:51:50 PM	BCl3 MFC set to  0.000000
11/27/2011	8:51:50 PM	PHl3 MFC set to  0.000000
11/27/2011	8:51:50 PM	SiCl4 MFC set to  0.000000
11/27/2011	8:51:50 PM	Bypass solenoid MFC set to  0.000000
11/27/2011	8:51:50 PM	Tube furnace set to 0
11/27/2011	8:51:51 PM	Run finished at 8:51 PM
11/27/2011	8:51:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
